Strain-enhanced high Q-factor GaN micro-electromechanical resonator
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Science and Technology of Advanced Materials
سال: 2020
ISSN: 1468-6996,1878-5514
DOI: 10.1080/14686996.2020.1792257